7,515,253

System for measuring a sample with a layer containing a periodic diffracting structure

7,483,133

Multiple angle of incidence spectroscopic scatterometer system

7,379,183

Apparatus and methods for detecting overlay errors using scatterometry

7,317,531

Apparatus and methods for detecting overlay errors using scatterometry

7,301,634

Apparatus and methods for detecting overlay errors using scatterometry

7,298,481

Apparatus and methods for detecting overlay errors using scatterometry

7,280,230

Parametric profiling using optical spectroscopic systems

7,280,212

Apparatus and methods for detecting overlay errors using scatterometry

7,102,749

Overlay alignment mark design

6,894,783

Overlay alignment mark design

6,614,520

Method for inspecting a reticle

6,580,505

Overlay alignment mark design

6,577,389

System and methods for inspection of transparent mask substrates

6,462,818

Overlay alignment mark design

6,079,256

Overlay alignment measurement of wafers

6,023,338

Overlay alignment measurement of wafers

5,889,593

Optical system and method for angle-dependent reflection or transmission measurement

4,712,913

Linear-scanned-array wavefront sensor

4,687,332

Self-referencing scan-shear interferometer

4,583,855

Optical phase measuring apparatus

4,480,916

Phase-modulated polarizing interferometer